AMPERTEC® High-Purity Chlorides (TANIOBIS)
Application Examples



Value Proposition
- AMPERTEC® Chlorides are the purest chlorides available in the market with the purity grade of up to 99.999 % on a large scale!
- Larger particle size results in:
- ・Improved material flow characteristics
- ・Less dust formation
- ・Improved storage stability
- ・Lower rate of hydrolysis
Powder Portfolio
- We offer TaCl5, NbCl5, WCl6, MoCl5 and WOCl4 with different purity levels.
- Furthermore, TANIOBIS offers customized powder compositions upon request.
TaCl5 | Purity Min. | Physical Characteristics |
---|---|---|
High Purity Grade | 99.93% | Particle Size: <3mm Description: white crystals Melting point: 216℃ |
Highest Purity Grade | 99.995% | |
Semiconductor Grade | 99.999% |
NbCl5 | Purity Min. | Physical Characteristics |
---|---|---|
High Purity Grade | 99.93% | Particle Size: <3mm Description: yellow crystals Melting point: 204℃ |
Highest Purity Grade | 99.995% |
Vapor Pressure of Chlorides versus Temperature


Purity Min. | Physical Characteristics | |
---|---|---|
WCl6 | 99.9% | Particle Size: <2mm Description: black-violet crystals Melting point: 282℃ |
MoCl5 | 99.9% | Particle Size: <2mm Description: black crystals Melting point: 194℃ |
WOCl4 | 99.9% | Particle Size: <2mm Description: orange crystals Melting point: 211℃ |
Application Methods
- CVD/ALD deposition of metal, oxide, nitride and carbide layers
- CVD/ALD precursor synthesis
- Flame pyrolysis
- Sol-gel
- Chemical synthesis
- Catalysis
About TANIOBIS
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