Sputtering Targets for Semiconductors

Summary

In recent years, low power consumption and high speed have been increasingly required for devices, and various types of high-quality targets are required for semiconductors to achieve this. Our semiconductor targets deliver products with high purity as the keyword, from mass-produced items to developed products using processes with excellent stability. In addition, our well-developed manufacturing and service bases in Japan and overseas enable us to respond to technology, sales, and delivery parameters in a timely manner.

Application Examples

Product Lineup

Provision of various targets with high purity.

Examples of Alloy and Oxide Targets

Material	CuMn	CuAl	WSi	WTi	NiPt	Si
Purity	5N	6N	5N	4N5	4N5	6N

Material	GeSbTe	CoFeB	Carbon
Purity	4N	3N	5N

Material	MgO	IGZO	Ta	Ti	Cu	W	Co
Purity	4N	4N	4N5	5N5	6N	5N	5N