Sputtering Targets for Semiconductors
Summary
Our sputtering targets for semiconductors are highly stable because they embody a wealth of metal product manufacturing technology, including high purity and alloying technology.
Application Examples
We operate our own integrated production process, from raw material procurement to manufacturing and collecting, and have a 60% share of the global market.
- We have three overseas processing plants outside Japan, which helps us to offer flexible delivery and technical proposals.
- We can supply various high-purity targets that contribute to the high functionality of devices.
Product Lineup
Provision of various targets with high purity.
Examples of Alloy and Oxide Targets
| Material | CuMn | CuAl | WSi | WTi | NiPt | Si |
|---|---|---|---|---|---|---|
| Purity | 5N | 6N | 5N | 4N5 | 4N5 | 6N |
| Material | GeSbTe | CoFeB | Carbon |
|---|---|---|---|
| Purity | 4N | 3N | 5N |
| Material | MgO | IGZO | Ta | Ti | Cu | W | Co |
|---|---|---|---|---|---|---|---|
| Purity | 4N | 4N | 4N5 | 5N5 | 6N | 5N | 5N |
Sputtering Targets
FAQ
Can you provide samples?
-
Yes, please consult us to discuss specifications and quantities.
Can you handle prototypes that are not in the product lineup?
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Yes, please consult us to discuss specifications and quantities.