AlSc & K-Na-Nb(KNN) Sputtering Targets for Lead-free Piezo Devices
Application Examples
We are developing AlSc and KNN (K-Na-Nb) targets for Pb-free piezoelectric MEMS to replace PZT (Pb-Zr-Ti).
Benefits for Customers
JX can provide AlSc and KNN Targets for Lead-free Piezoelectric MEMS Sensor.
- Al-Sc-N alloy shows higher piezoelectric coefficient than AlN alloy.
- We developed a manufacturing process to produce AlSc target with low oxygen.
- Maximum φ350mm target size is possible.
Analysis results (not guaranteed spec)
| Sc (Composition A) | Sc (Composition B) | ||
|---|---|---|---|
| Na | <0.1 | <0.1 | ppm |
| K | <0.1 | <0.1 | ppm |
| Fe | 120 | 160 | ppm |
| Co | <1 | 1 | ppm |
| Ni | 30 | 27 | ppm |
| La | 1 | 2 | ppm |
| Ta | <500 | <500 | ppm |
| C | 30 | 30 | ppm |
| O | 490 | 490 | ppm |
| H | <10 | <10 | ppm |
JX succeeded to produce high-Sc AlSc target with low oxygen content.
- KNN provides comparable piezoelectric properties to the PZT system.
- We developed high-density KNN target with high deposition rate.
- Maximum φ300mm target size is possible.
Analysis results (not guaranteed spec)
| KNN | ||
|---|---|---|
| Li | <10 | ppm |
| Al | 200 | ppm |
| Ca | 20 | ppm |
| Mn | <10 | ppm |
| Fe | <10 | ppm |
| Co | <10 | ppm |
| Ni | <10 | ppm |
| Cu | <20 | ppm |
| Zr | <10 | ppm |
| C | 90 | ppm |
Deposition rate of KNN target
JX achieved high deposition rate (over 3.0µm/hr) for 1kW sputtering power.
Properties of AlSc・KNN
Al-Sc Phase Diagram
KNbO3-NaNbO3 Phase Diagram
