AlSc & K-Na-Nb(KNN) Sputtering Targets for Lead-free Piezo Devices
Application Examples

Benefits for Customers
JX can provide AlSc and KNN Targets for Lead-free Piezoelectric MEMS Sensor.
- Al-Sc-N alloy shows higher piezoelectric coefficient than AlN alloy.
- We developed a manufacturing process to produce AlSc target with low oxygen.
- Maximum φ300mm target size is possible.
Analysis results (not guaranteed spec)
Sc (Composition A) | Sc (Composition B) | ||
---|---|---|---|
Na | <0.1 | <0.1 | ppm |
K | <0.1 | <0.1 | ppm |
Fe | 120 | 160 | ppm |
Co | <1 | 1 | ppm |
Ni | 30 | 27 | ppm |
La | 1 | 2 | ppm |
Ta | <500 | <500 | ppm |
C | 30 | 30 | ppm |
O | 490 | 490 | ppm |
H | <10 | <10 | ppm |
JX succeeded to produce high-Sc AlSc target with low oxygen content.
- KNN provides comparable piezoelectric properties to the PZT system.
- We developed high-density KNN target with high deposition rate.
- Maximum φ300mm target size is possible.
Analysis results (not guaranteed spec)
KNN | ||
---|---|---|
Li | <10 | ppm |
Al | 200 | ppm |
Ca | 20 | ppm |
Mn | <10 | ppm |
Fe | <10 | ppm |
Co | <10 | ppm |
Ni | <10 | ppm |
Cu | <20 | ppm |
Zr | <10 | ppm |
C | 90 | ppm |
Deposition rate of KNN target

JX achieved high deposition rate (over 3.0µm/hr) for 1kW sputtering power.
Properties of AlSc・KNN
Al-Sc Phase Diagram

KNbO3-NaNbO3 Phase Diagram
